Archive of Medical Research

At-wavelength, system-level flare characterization of extreme-ultraviolet optical systems.
The extreme-ultraviolet (EUV) phase-shifting point-diffraction interferometer (PS/PDI) has recently been developed to provide high-accuracy wave-front characterization critical to the development of EUV lithography systems. Here we describe an enhanced implementation of the PS/PDI that significantly extends its measurement bandwidth. The enhanced PS/PDI is capable of […]

Separation of isoclinics and isochromatics from photoelastic data with a regularized phase-tracking technique.
We present the application of a regularization algorithm to the processing of photoelastic fringe patterns. The method used is a modified regularized phase-tracking (RPT) algorithm applied to phase-shifted images. In particular, we present an algorithm for isoclinic-isochromatic separation that uses […]